中文说明：针对光栅等二元光学元件的制造过程中的非规则结构的检测问题，提出一种检测系统的原理设计，该系统应能够完成待测结构与标准结构的比对，得到待测结构的制造误差。根据所给出的4F 光学系统及空间滤波器的系统，分析该系统的原理，进行理论推导，并通过MATLAB 编写程序对该系统原理进行仿真。并进行误差因素的影响分析。
English Description：
Process for the manufacture of binary optical element grating in a non-regular structure of the detection problem, we propose a principle of the detection system design, the system should be able to complete the structure of the test structure than the standard to obtain a manufacturing error of the test structure .4F optical system and given a spatial filter system according to the principles of the system analysis, theoretical derivation and simulation by MATLAB programming the system works. And the effect of the error factors.